Grant: Discovery Grants Program - Individual
Memorial University of Newfoundland
$32,000.00
Precision Motion Stages for Enhancing the Performance of Lithography in Semiconductor Manufacturing
FY 2021-22
Summary
Control; Manufacturing; Mechatronics
Program
Discovery Grants Program - Individual
Recipient
Location
Newfoundland and Labrador, Canada
Recipient Type
Academia
Type
Grant
Source
NSERC's Awards Data
As published
Application id
RGPIN-2018-04704
Name nom
Al Janaideh, Mohammad
Department département
Mechanical Engineering
Organization id
89
Institution établissement
Memorial University of Newfoundland
Province en
Newfoundland and Labrador
Province fr
Terre-Neuve-et-Labrador
Country en
CANADA
Country fr
CANADA
Fiscal year exercice financier
2021
Competition year année de concours
2018
Award amount
32000
Program id
RGPIN
Program name en
Discovery Grants Program - Individual
Program name fr
Programme de subventions à la découverte - individuelles
Group en
Discovery grants programs
Group fr
Programmes de subventions à la découverte
Committee code
1512
Committee name en
Mechanical Engineering
Committee name fr
Génie mécanique
Area of application code
500
Area of application group en
Manufacturing processes and products
Area of application group fr
Procédés et produits industriels
Area of application en
Manufacturing processes and products
Area of application fr
Procédés et produits industriels
Research subject code
2523
Research subject group en
Electrical and electronic engineering
Research subject group fr
Génie électrique et électronique
Research subject en
Semiconductor fabrication and packaging
Research subject fr
Fabrication et mise sous enveloppe de semi-conducteurs
Installment
inst:4
Partie
1
Nb partie
5
Application title
Precision Motion Stages for Enhancing the Performance of Lithography in Semiconductor Manufacturing
Keyword
NSERC
Application summary
Control; Manufacturing; Mechatronics
