Grant: Research Tools and Instruments

This proposal aims to purchase and install a high-resolution infrared (IR) microscope at the Intelligent Sensing Laboratory (ISL) at Simon Fraser University. This infrared microscope is crucially needed for the progress of nearly all of our current, recently funded, and upcoming research projects. The requested microscope will be used for the inspection of silicon microdevices and wafers during and after the completion of fabrication processes. The operating principle relies on the fact that silicon is transparent in short- to mid-wave IR ranges. Equipped with a proper camera, objectives, and light source, the microscope allows us to see through the silicon layers and inspect the structural layers and material interfaces below the surface of the device or wafer. Since the vast majority of our research activities rely on the development of silicon microdevices based on different microfabrication processes, this microscope will become an indispensable tool in our experimental research and will be immediately integrated into the training of researchers from the co-applicants teams. The microscope is also equipped with imaging capabilities for thermal mapping of materials and devices, enabling it to be used in numerous additional research projects. Despite being an extremely valuable inspection tool, we have been unable to locate a suitable IR microscope at nearby research laboratories. The lack of access to a proper inspection tool of similar capability has created numerous challenges and has led to numerous failed fabrication runs, and hence, inefficient use of research funds while delaying the progress of the researchers. We are at the initial phases of several large projects with significant potential for scientific and technical breakthroughs. These projects rely on the successful development of several novel silicon microsystems, further highlighting the need to acquire this critical inspection tool. We will provide access to the tool to researchers beyond our teams and provide the necessary training when needed. We will also develop procedures so that remote users can have their samples sent to us and examined under the microscope with help from local operators.