Grant: Idea to Innovation

This project is aimed at the development of innovative temperature and pressure microsensor array systems for aerospace applications. Following the validation of the inventive concepts with large-scale experimental models, this Idea-to-Innovation Phase 1 project is directed at the ultimate miniaturization of these devices, using monolithic silicon-based microfabrication techniques. This novel patented microsensor array allows real-time simultaneous measurements of temperature and/or pressure at multiple spatial locations, using only two communication/power leads. Frequency modulation is used to multiplex the signals of tens of sensors through common wires. For every measurement, analog microelectronic oscillators generate the required waveforms at frequencies that are temperature/pressure dependent. These oscillators are powered with a common DC power source, and superpose their output signals by current addition into the power supply leads. The multiplexed signal can then be recorded using a single data acquisition channel, and is analysed in the frequency domain to obtain temperatures/pressures. We are now at the stage of sensor miniaturization, which is the object of the present I2I Phase 1 proposal. The proposed project is thus a critical step in the development of the commercial device as it will allow us to achieve three specific objectives: 1- Demonstrate the capability to miniaturize sensor footprint using clean-room microfabrication processes. 2- Optimize analog oscillator design to increase multiplexing density by narrowing oscillator bandwidth and minimizing crosstalk. 3- Integrate the pressure sensing technology into the frequency-multiplexed sensor configuration.