Grant: Research Tools and Instruments - Category 1 (<$150,000)

The proposed facility will establish nanostructure analysis and maskless nanofabrication system using near-field scanning optical microscopy (NSOM) coupled with an ultrafast laser, and it will be integrated with the existing laser nanomachining facility at Ryerson University. Nanostructure analysis using microscopic imaging techniques have improved significantly in terms of quantitative information about the properties. The proposed nanostructure analysis by Microscopy (NSOM/SNOM) is a microscopic technique for nanostructure investigation that breaks the far field resolution limit by exploiting the properties of evanescent waves. State-of-the-art nanofabrication techniques require heavy capital investment, have high operational costs, and involve long processing times. Maskless nanofabrication techniques have gained significant research interest in recent years and are characterized by fewer processing steps, pattern flexibility, and significantly reduced capital and operational cost. The proposed facility will allow researchers and engineers to develop their design ideas using new maskless nanofabrication concepts and methodologies. Similar facilities have been established by a few international institutions, but no comparable facility exists anywhere else in Canada. The three sectors that will receive a direct benefit are Biomedical Devices, MEMS and NEMS, and Micro/nano-electronics. This proposal involves 12 applicants from 2 universities from Ontario. We form an interdisciplinary research team with expertise in nano charactrisation, nanotechnology and nanofabrication. This proposal targets the training of highly qualified personnel in the area of nanotechnology, health, and related life sciences and technologies. The requested infrastructure will enable us purse our goal to be in the top 5 internationally, in the field of maskless nanofabrication.