Grant: Alliance Grants

AEPONYX develops and manufactures optical chips by combining photonics on silicon nitride (SiN) with micro-electro-mechanical systems (MEMS). To fully benefit from the potential offered by this advanced technology, some bottlenecks must urgently be addressed. In particular, it is crucial to achieve thin SiN films up to 1 micrometer-thick without cracks and waveguides with very low optical losses (< 2 dB/m), and to develop state-of-the-art metrology tools to monitor the quality of these films and the resulting photonic devices. In order to meet such scientific and technological challenges, a multidisciplinary team of researchers from AEPONYX, ÉTS, INRS and Université de Montréal was settled. In addition to developing a world-class silicon nitride-based photonic platform, the project will pave the way for new applications of this cutting-edge technology in the field of biosensors and THz radiation generation. This project will help AEPONYX position itself as a world leader in the manufacturing of SiN-based integrated optical products. It will also provide a unique opportunity for academic and AEPONYX researchers to make major contributions to areas of strategic interest to Canada, and to integrate their research project into a strategy to share knowledge, infrastructure and responsibility for training highly qualified personnel.