Grant: Collaborative Project Grants (H)
Institut national de la recherche scientifique
$105,000.00
Numerical and experimental investigation of plasma-induced nanometer pattern transfer
FY 1996-97
Summary
No summary - Aucun sommaire
Program
Collaborative Project Grants (H)
Location
Quebec, Canada
Recipient Type
Academia
Type
Grant
Source
NSERC's Awards Data
As published
Application id
181603-1995
Name nom
Chaker, Mohamed
Department département
INRS - Énergie et matériaux
Organization id
56
Institution établissement
Institut national de la recherche scientifique
Province en
Québec
Province fr
Québec
Country en
CANADA
Country fr
CANADA
Fiscal year exercice financier
1996
Competition year année de concours
1995
Award amount
105000
Program id
CPGPJ
Program nane en
Collaborative Project Grants (H)
Program name fr
Subventions de projets concertés (H)
Group en
Discovery grants programs
Group fr
Programmes de subventions à la découverte
Committee code
172
Committee name en
Collab Proj Grants Sel Panel C (H)
Committee name fr
Cté sél de subv projets conc C (H)
Area of application code
512
Area of application group en
Manufacturing processes and products
Area of application group fr
Procédés et produits industriels
Area of application en
Transport equipment
Area of application fr
Matériel de transport
Research subject code
3107
Research subject group en
Physics
Research subject group fr
Physique
Research subject en
Plasma physics
Research subject fr
Physique des plasmas
Partie
2
Nb partie
3
Application title
Numerical and experimental investigation of plasma-induced nanometer pattern transfer
Keyword
NA
Application summary
No summary - Aucun sommaire
