Grant: Strategic Projects - Group

Abrasive jet micromachining (AJM) uses a small high-speed air jet to accelerate microscopic abrasive particles toward a target material. By patterning the target surface with erosion resistant masks, various microscale features (e.g. microchannels, microholes, v grooves, etc) can be mechanically etched into it. The etching can be controlled by varying process parameters such as the mask and particle material properties, the jet impact angle, and the velocity and spatial distribution of particles within the jet. AJM is a relatively new approach to the fabrication of silicon, ceramic and polymeric structures for micro electro mechanical systems (MEMS), optoelectronic, micro-fuel cell and microfluidic applications. Advantages of AJM over traditional microfabrication processes include a much higher material removal rate, a much lower equipment cost, environmental friendliness (no chemicals) and the ability to etch materials to different depths on a single substrate. As a result, simple low cost and environmentally friendly systems can be installed to provide a method for in house rapid prototyping of novel micro scale components. The investigators have previously established process models that can be used to predict the etched shape of commonly used microscale features (channels, holes, planar areas) in glass substrates. The proposed research builds on this work, to establish and experimentally verify analytical and numerical process models that will extend the application of AJM to the micromachining of novel 3D and multilevel features in the materials (polymers/elastomers and layered materials) that will form the next generation of micro components of interest to our industrial partners. These process models will incorporate the effect of changes in a wide variety of process parameters (particle size, shape, velocity, mask material, geometry, target material, etc.) on the predicted etched shape. This fundamental research will form the basis for improving AJM's potential as a low cost and rapid-turnaround technology platform for the microfabrication of novel multilevel and 3D components for the micro fuel cell, microfluidic lab-on-chip, opto-electronics, and MEMS industries in Canada.