Grant: Discovery Grants Program - Individual
Carleton University
$56,000.00
Infrared MEMS
FY 2024-25
Summary
In the past the mid and far infrared spectrum was mainly of interest to astronomers and a few spectroscopists,but in recent years interest has grown dramatically in sensing and imaging using this wavelength range. One of the challenges to expanding application of infrared technology is in devising miniature systems suitable for field use. These might be, for example, portable hand held devices or units mounted on remotely operated or autonomous vehicles. It is therefore necessary to develop compact, efficient, low cost source and detector technologies that do not require cooling.
A key goal of the proposed program is to merge ideas in infrared materials, micromachining, thermal design, plasmonics, and metasurfaces to extend the performance expectations for thermal mid and far infrared sources, detectors, and optical components. This work will lead to an improved understanding of the interaction between heat, light, materials, and structures. The results will find application in non dispersive and spectroscopic gas sensing, materials analysis, and multi and hyper spectral imaging.
The proposed program will develop microfabricated infrared optical elements by monolithically integrating micromachined thermal isolation structures with plasmonic and metamaterial structures for dispersion control. The combination of technologies will lead to highly efficient infrared emitters with engineered emission spectra. The applicant has extensive experience in thermal detectors, microfabrication, thin film materials, process design and development for MEMS and sensors and will ensure an experimental demonstration of a manufacturable device using local microfabrication capabilities. Existing collaborations on plasmonic sensors, on thermal and optical device modeling, and on infrared metamaterials will support numerical evaluation of design concepts. Collaboration between groups at Carleton, local companies, and external service labs will enable comprehensive device testing.
The significance of this work will be seen in a number of areas. The Quantum Cascade Laser is the standard for intense and coherent radiation in the mid to far infrared. However the MEMS thermal emitter continues to be a popular IR source available from several vendors. A more efficient emitter with a customized emission spectrum will find a market in miniature, low power and low cost gas sensors. Miniaturization of optical and detector components in this wavelength range will enable arrays of detectors with different spectral response allowing multi spectral measurements. Further development of tunable elements through thermal or electrostatic actuation can lead to measurement of a continuous spectrum for imaging or spectroscopic measurement.
Program
Discovery Grants Program - Individual
Recipient
Location
Ontario, Canada
Recipient Type
Academia
Type
Grant
Source
NSERC's Awards Data
As published
Application id
RGPIN-2019-06309
Name nom
Tait, Robert
Department département
Head Office
Organization id
23
Institution établissement
Carleton University
Province en
Ontario
Province fr
Ontario
Country en
CANADA
Country fr
CANADA
Fiscal year exercice financier
2024
Competition year année de concours
2019
Award amount
56000
Program id
RGPIN
Program name en
Discovery Grants Program - Individual
Program name fr
Programme de subventions à la découverte - individuelles
Group en
DISCOVERY RESEARCH
Group fr
RECHERCHE AXÉE SUR LA DÉCOUVERTE
Committee code
1510
Committee name en
Electrical and Computer Engineering
Committee name fr
Génie électrique et informatique
Area of application code
515
Area of application group en
Manufacturing processes and products
Area of application group fr
Procédés et produits industriels
Area of application en
Instrumentation technology
Area of application fr
Technologie de l'instrumentation
Research subject code
2515
Research subject group en
Electrical and electronic engineering
Research subject group fr
Génie électrique et électronique
Research subject en
Electronic materials and components
Research subject fr
Matériels et composants électroniques
Field of research list names en
Not available
Field of research list names fr
Non disponible
Socioeconomic objective list names en
Not available
Socioeconomic objective list names fr
Non disponible
Application title
Infrared MEMS
Keywords
mems; infrared; metamaterial; gas sensor; micro/nanotechnology; ndir; ftir; bolometer
Application summary
In the past the mid and far infrared spectrum was mainly of interest to astronomers and a few spectroscopists,but in recent years interest has grown dramatically in sensing and imaging using this wavelength range. One of the challenges to expanding application of infrared technology is in devising miniature systems suitable for field use. These might be, for example, portable hand held devices or units mounted on remotely operated or autonomous vehicles. It is therefore necessary to develop compact, efficient, low cost source and detector technologies that do not require cooling.
A key goal of the proposed program is to merge ideas in infrared materials, micromachining, thermal design, plasmonics, and metasurfaces to extend the performance expectations for thermal mid and far infrared sources, detectors, and optical components. This work will lead to an improved understanding of the interaction between heat, light, materials, and structures. The results will find application in non dispersive and spectroscopic gas sensing, materials analysis, and multi and hyper spectral imaging.
The proposed program will develop microfabricated infrared optical elements by monolithically integrating micromachined thermal isolation structures with plasmonic and metamaterial structures for dispersion control. The combination of technologies will lead to highly efficient infrared emitters with engineered emission spectra. The applicant has extensive experience in thermal detectors, microfabrication, thin film materials, process design and development for MEMS and sensors and will ensure an experimental demonstration of a manufacturable device using local microfabrication capabilities. Existing collaborations on plasmonic sensors, on thermal and optical device modeling, and on infrared metamaterials will support numerical evaluation of design concepts. Collaboration between groups at Carleton, local companies, and external service labs will enable comprehensive device testing.
The significance of this work will be seen in a number of areas. The Quantum Cascade Laser is the standard for intense and coherent radiation in the mid to far infrared. However the MEMS thermal emitter continues to be a popular IR source available from several vendors. A more efficient emitter with a customized emission spectrum will find a market in miniature, low power and low cost gas sensors. Miniaturization of optical and detector components in this wavelength range will enable arrays of detectors with different spectral response allowing multi spectral measurements. Further development of tunable elements through thermal or electrostatic actuation can lead to measurement of a continuous spectrum for imaging or spectroscopic measurement.