Grant: Research Tools and Instruments
University of Waterloo
$108,130.00
Role-to-plate nanoimprint lithography for scalable metasurface fabrication
FY 2024-25
Summary
Nanophotonic devices and metamaterials-which are artificial structures that let us control and design material properties-have the potential to transform various technologies, including communication systems, optical sensors, smart clothing, and augmented reality. However, these devices need extremely precise, small-scale features over large areas, which current manufacturing methods, like traditional lithography, can't achieve.
A new technique called nanoimprint lithography offers a promising solution. It combines high precision with the ability to cover large areas quickly and efficiently, making it ideal for producing these advanced technologies.
In this proposal, we are requesting funds to buy a small, tabletop nanoimprint lithography tool for academic use. This tool will allow researchers to make these devices faster and at a lower cost, improving the efficiency of research and making the technology available to more people. As a result, we'll be able to produce more samples, speeding up our research progress.
Additionally, by proving that devices can be made using this scalable manufacturing process, we'll attract interest from industry and encourage the transfer of our technology to commercial use.
Finally, for the photonics industry to grow, especially with the adoption of nanoimprint lithography, we will need more skilled workers with experience in this area. By acquiring this equipment, we can train students and staff in these techniques, helping to meet the demand for skilled personnel in the field.
Program
Research Tools and Instruments
Recipient
Location
Ontario, Canada
Recipient Type
Academia
Type
Grant
Source
NSERC's Awards Data
As published
Application id
RTI-2025-00071
Name nom
Schulz, Sebastian
Department département
Electrical and Computer Engineering
Organization id
33
Institution établissement
University of Waterloo
Province en
Ontario
Province fr
Ontario
Country en
CANADA
Country fr
CANADA
Fiscal year exercice financier
2024
Competition year année de concours
2025
Award amount
108130
Program id
RTI
Program name en
Research Tools and Instruments
Program name fr
Outils et instruments de recherche
Group en
DISCOVERY RESEARCH
Group fr
RECHERCHE AXÉE SUR LA DÉCOUVERTE
Committee code
1610
Committee name en
Electrical and Computer Engineering (RTI)
Committee name fr
Génie électrique et infomatique (OIR)
Area of application code
1206
Area of application group en
Advancement of knowledge
Area of application group fr
Avancement des connaissances
Area of application en
Engineering
Area of application fr
Génie
Research subject code
2523
Research subject group en
Electrical and electronic engineering
Research subject group fr
Génie électrique et électronique
Research subject en
Semiconductor fabrication and packaging
Research subject fr
Fabrication et mise sous enveloppe de semi-conducteurs
Field of research list names en
Not available
Field of research list names fr
Non disponible
Socioeconomic objective list names en
Not available
Socioeconomic objective list names fr
Non disponible
Application title
Role-to-plate nanoimprint lithography for scalable metasurface fabrication
Keywords
nanofabrication; lithography; nano-imprint lithography; metamaterials; photonics; energy harvesting
Application summary
Nanophotonic devices and metamaterials-which are artificial structures that let us control and design material properties-have the potential to transform various technologies, including communication systems, optical sensors, smart clothing, and augmented reality. However, these devices need extremely precise, small-scale features over large areas, which current manufacturing methods, like traditional lithography, can't achieve.
A new technique called nanoimprint lithography offers a promising solution. It combines high precision with the ability to cover large areas quickly and efficiently, making it ideal for producing these advanced technologies.
In this proposal, we are requesting funds to buy a small, tabletop nanoimprint lithography tool for academic use. This tool will allow researchers to make these devices faster and at a lower cost, improving the efficiency of research and making the technology available to more people. As a result, we'll be able to produce more samples, speeding up our research progress.
Additionally, by proving that devices can be made using this scalable manufacturing process, we'll attract interest from industry and encourage the transfer of our technology to commercial use.
Finally, for the photonics industry to grow, especially with the adoption of nanoimprint lithography, we will need more skilled workers with experience in this area. By acquiring this equipment, we can train students and staff in these techniques, helping to meet the demand for skilled personnel in the field.