Grant: Research Tools and Instruments - Category 1 (<$150,000)
Queen's University
$69,211.00
A probe station compatible with a laser-vibrometer for advanced MEMS dynamic testing
FY 2006-07
Summary
Recent development of Micro-Electro-Mechanical Systems (MEMS) has the potential to significantly boost the technological progress in such fields as transportation, telecom, multimedia, medicine and health care, etc. MEMS is destined to be a key driver technology for innovations in numerous applications with dramatic impact on a wide spectrum of industry, from automotive to biomedical engineering. Prototype characterization and validation is of paramount importance in MEMS technology development. Simulation and design optimization of MEMS devices is insufficient and can produce invalid results as scaling issues, the unique characteristics of varying fabrication processes and the systems environment are not fully tested. To obtain accurate performance information experimental testing of a device is the optimal approach. For MEMS testing, accessibility to micro scale components and the elimination of noise are the two essential factors. The applicant's research is targeted to develop MEMS devices for microasssembly and micromanipulations for biomedical applications. Intensive experimental testing is required as a key part of the research. The funding requested in this grant application will be used to purchase two pieces of equipment: a probe station and an anti-vibration table to support the applicant's research. Successful experimental results will support and enhance the analytical modeling and design of novel MEMS devices, and consequently lead to the success of the research. This will pave the way to modularization and commercialization of biomedical MEMS devices and thus significantly advance the field in Canada. The requested equipment will complement a CFI-awarded laser vibrometer. Seeking to increase the impact of CFI and NSERC investments, the applicant is in discussion with CMC Microsystems exploring the possibility of CMC enabling Canada-wide access to this Queen's-based equipment. Such an arrangement would allow MEMS researchers across Canada to gain benefit from this capability and increase the opportunities for developing highly-qualified personnel in the area of MEMS test.
Program
Research Tools and Instruments - Category 1 (<$150,000)
Recipient
Location
Ontario, Canada
Recipient Type
Academia
Type
Grant
Source
NSERC's Awards Data
As published
Application id
345354-2007
Name nom
Lai, Yongjun
Department département
Mechanical and Materials Engineering
Organization id
29
Institution établissement
Queen's University
Province en
Ontario
Province fr
Ontario
Country en
CANADA
Country fr
CANADA
Fiscal year exercice financier
2006
Competition year année de concours
2007
Award amount
69211
Program id
EQPEQ
Program name en
Research Tools and Instruments - Category 1 (<$150,000)
Program name fr
Outils et instruments de recherche - catégorie 1 (<150 000$)
Group en
Discovery grants programs
Group fr
Programmes de subventions à la découverte
Committee code
1053
Committee name en
Mechanical Engineering - A
Committee name fr
Génie mécanique - A
Area of application code
1206
Area of application group en
Advancement of knowledge
Area of application group fr
Avancement des connaissances
Area of application en
Engineering
Area of application fr
Génie
Research subject code
2100
Research subject group en
Mechanical engineering
Research subject group fr
Génie mécanique
Research subject en
Mechanical engineering
Research subject fr
Génie mécanique
Partie
1
Nb partie
1
Application title
A probe station compatible with a laser-vibrometer for advanced MEMS dynamic testing
Keyword
NA
Application summary
Recent development of Micro-Electro-Mechanical Systems (MEMS) has the potential to significantly boost the technological progress in such fields as transportation, telecom, multimedia, medicine and health care, etc. MEMS is destined to be a key driver technology for innovations in numerous applications with dramatic impact on a wide spectrum of industry, from automotive to biomedical engineering. Prototype characterization and validation is of paramount importance in MEMS technology development. Simulation and design optimization of MEMS devices is insufficient and can produce invalid results as scaling issues, the unique characteristics of varying fabrication processes and the systems environment are not fully tested. To obtain accurate performance information experimental testing of a device is the optimal approach. For MEMS testing, accessibility to micro scale components and the elimination of noise are the two essential factors. The applicant's research is targeted to develop MEMS devices for microasssembly and micromanipulations for biomedical applications. Intensive experimental testing is required as a key part of the research. The funding requested in this grant application will be used to purchase two pieces of equipment: a probe station and an anti-vibration table to support the applicant's research. Successful experimental results will support and enhance the analytical modeling and design of novel MEMS devices, and consequently lead to the success of the research. This will pave the way to modularization and commercialization of biomedical MEMS devices and thus significantly advance the field in Canada. The requested equipment will complement a CFI-awarded laser vibrometer. Seeking to increase the impact of CFI and NSERC investments, the applicant is in discussion with CMC Microsystems exploring the possibility of CMC enabling Canada-wide access to this Queen's-based equipment. Such an arrangement would allow MEMS researchers across Canada to gain benefit from this capability and increase the opportunities for developing highly-qualified personnel in the area of MEMS test.
