Grant: Research Tools and Instruments - Category 1 (<$150,000)
University of Waterloo
$112,198.00
Chemical mechanical planarization system for MEMS application
FY 2005-06
Summary
No summary - Aucun sommaire
Program
Research Tools and Instruments - Category 1 (<$150,000)
Recipient
Location
Ontario, Canada
Recipient Type
Academia
Type
Grant
Source
NSERC's Awards Data
As published
Application id
329837-2006
Name nom
Mansour, Raafat
Department département
Electrical & Computer Engineering
Organization id
33
Institution établissement
University of Waterloo
Province en
Ontario
Province fr
Ontario
Country en
CANADA
Country fr
CANADA
Fiscal year exercice financier
2005
Competition year année de concours
2006
Award amount
112198
Program id
EQPEQ
Program name en
Research Tools and Instruments - Category 1 (<$150,000)
Program name fr
Outils et instruments de recherche - catégorie 1 (<150 000$)
Group en
Discovery grants programs
Group fr
Programmes de subventions à la découverte
Committee code
335
Committee name en
Electromag. & Electr. Systems (H)
Committee name fr
Électromagn. et syst. électr. (H)
Area of application code
514
Area of application group en
Manufacturing processes and products
Area of application group fr
Procédés et produits industriels
Area of application en
Communications equipment
Area of application fr
Matériel de télécommunications
Research subject code
2519
Research subject group en
Electrical and electronic engineering
Research subject group fr
Génie électrique et électronique
Research subject en
Microelectronics
Research subject fr
Microélectronique
Partie
1
Nb partie
1
Application title
Chemical mechanical planarization system for MEMS application
Keyword
NA
Application summary
No summary - Aucun sommaire
