Grant: Idea to Innovation
Simon Fraser University
$119,600.00
Low-cost MEMS gyro prototype fabrication
FY 2010-11
Summary
Angular rate measurements are used in applications such as navigation, vehicle stability control, and more
recently, video games and cellular phones. Miniature angular rate sensors implemented in MEMS
(Microelectromechanical Systems) technology are commonly referred to as MEMS gyros. Market studies
predict that rate-grade MEMS gyros will have a huge market in consumer electronics, as long as the device cost
can be reduced significantly.
A MEMS gyro was invented at Simon Fraser University in 2009. This device has a simple structure and its
operation is based on thermal principles. With no moving parts and a simple device structure, this device can
be produced at low cost and has unmatched robustness. A rudimentary and yet functional MEMS gyro was
built in our laboratory to demonstrate the new angular rate sensing concept.
In this project we will build a refined prototype with enhanced performance, and demonstrate the feasibility of
using this technology to produce thermal MEMS gyros that can sense angular rate in all three orthogonal axes.
This low-cost MEMS gyro technology can be commercialized in two to three years.
Program
Idea to Innovation
Recipient
Location
British Columbia, Canada
Recipient Type
Academia
Type
Grant
Source
NSERC's Awards Data
As published
Application id
395120-2009
Name nom
Leung, Albert
Department département
Engineering Science, School of
Organization id
5
Institution établissement
Simon Fraser University
Province en
British Columbia
Province fr
Colombie-Britannique
Country en
CANADA
Country fr
CANADA
Fiscal year exercice financier
2010
Competition year année de concours
2009
Award amount
119600
Program id
I2IPJ
Program name en
Idea to Innovation
Program name fr
De l'idée à l'innovation
Group en
Research partnerships programs
Group fr
Programmes de partenariat
Committee code
96
Committee name en
RPP Internal Decision Cttee
Committee name fr
Cté de décision interne - PPR
Area of application code
515
Area of application group en
Manufacturing processes and products
Area of application group fr
Procédés et produits industriels
Area of application en
Instrumentation technology
Area of application fr
Technologie de l'instrumentation
Research subject code
2523
Research subject group en
Electrical and electronic engineering
Research subject group fr
Génie électrique et électronique
Research subject en
Semiconductor fabrication and packaging
Research subject fr
Fabrication et mise sous enveloppe de semi-conducteurs
Partie
1
Nb partie
1
Application title
Low-cost MEMS gyro prototype fabrication
Keyword
NSERC
Application summary
Angular rate measurements are used in applications such as navigation, vehicle stability control, and more
recently, video games and cellular phones. Miniature angular rate sensors implemented in MEMS
(Microelectromechanical Systems) technology are commonly referred to as MEMS gyros. Market studies
predict that rate-grade MEMS gyros will have a huge market in consumer electronics, as long as the device cost
can be reduced significantly.
A MEMS gyro was invented at Simon Fraser University in 2009. This device has a simple structure and its
operation is based on thermal principles. With no moving parts and a simple device structure, this device can
be produced at low cost and has unmatched robustness. A rudimentary and yet functional MEMS gyro was
built in our laboratory to demonstrate the new angular rate sensing concept.
In this project we will build a refined prototype with enhanced performance, and demonstrate the feasibility of
using this technology to produce thermal MEMS gyros that can sense angular rate in all three orthogonal axes.
This low-cost MEMS gyro technology can be commercialized in two to three years.
