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Grant: Major Facilities Access Grants

Institut national de la recherche scientifique

$125,550.00

Laboratory of micro- and nanofabrication (LMN)

EF 2008-09

Résumé
The Laboratory of Micro- and Nanofabrication (LMN) was formed by the creation of a common facility based on the equipment initially available mainly at INRS-Energie, Matériaux et Télécommunications and at the department of Electrical and Computer Engineering at Université de Sherbrooke. Since 2003, this resource has successfully integrated new major micro- and nanofabrication tools (39 M$), some of them unique in Canada. The whole represents an investment of about 50 M$. The infrastructure involves 4 main complementary R&D units: (i) lithography (electrons/ions/photons), (ii) thin film etching, (iii) materials and nanomaterials synthesis and modification, and (iv) materials and device characterization. By its very nature, LMN addresses (i) the needs of state-of-the-art research in areas which form the basis of device fabrication (i.e. lithography, etching, synthesis and ion implantation technologies) and (ii) the needs of pre-competitive research in various key areas of high technology (by making it possible to develop advanced devices and to test new concepts in photonics, RF communications, nanoelectronics and biomedicine). The access to the LMN is also vital for researchers involved in the general areas of materials synthesis and/or characterization for applications in other sectors, namely tribological coatings, energy, environment, etc. The access to this resource is essential for 54 principal researchers from (12) Canadian universities, for 41 collaborators and more than 50 secondary users across Canada and abroad. It is also at the heart of the training of more than 210 postgraduate students (M.Sc. and Ph.D.) and 48 postdoctoral fellows. In our development strategy, the support of NSERC to LMN is absolutely crucial to continue to capitalize on the exceptional momentum of the last few years that made the LMN one of the leading international laboratories of the academic sector in a multidisciplinary domain (physics, chemistry, materials science, electrical and computer engineering, etc.).
Programme
Major Facilities Access Grants
Emplacement
Quebec, Canada
Type de bénéficiaire
Academia
Type
Grant
Source
NSERC's Awards Data

Tel que publié

Application id
250182-2006
Name nom
Chaker, Mohamed
Department département
Centre Énergie, Matériaux et Télécommunication - Montréal
Organization id
56
Institution établissement
Institut national de la recherche scientifique
Province en
Québec
Province fr
Québec
Country en
CANADA
Country fr
CANADA
Fiscal year exercice financier
2008
Competition year année de concours
2006
Award amount
125550
Program id
MFAIF
Program nane en
Major Facilities Access Grants
Program name fr
Subventions d'accès aux installations majeures
Group en
Discovery grants programs
Group fr
Programmes de subventions à la découverte
Committee code
99
Committee name en
MFA Selection Panel
Committee name fr
Cté des subventions d'AIM
Area of application code
1206
Area of application group en
Advancement of knowledge
Area of application group fr
Avancement des connaissances
Area of application en
Engineering
Area of application fr
Génie
Research subject code
2500
Research subject group en
Electrical and electronic engineering
Research subject group fr
Génie électrique et électronique
Research subject en
Electrical and electronic engineering
Research subject fr
Génie électrique et électronique
Partie
3
Nb partie
3
Application title
Laboratory of micro- and nanofabrication (LMN)
Keyword
NA
Application summary
The Laboratory of Micro- and Nanofabrication (LMN) was formed by the creation of a common facility based on the equipment initially available mainly at INRS-Energie, Matériaux et Télécommunications and at the department of Electrical and Computer Engineering at Université de Sherbrooke. Since 2003, this resource has successfully integrated new major micro- and nanofabrication tools (39 M$), some of them unique in Canada. The whole represents an investment of about 50 M$. The infrastructure involves 4 main complementary R&D units: (i) lithography (electrons/ions/photons), (ii) thin film etching, (iii) materials and nanomaterials synthesis and modification, and (iv) materials and device characterization. By its very nature, LMN addresses (i) the needs of state-of-the-art research in areas which form the basis of device fabrication (i.e. lithography, etching, synthesis and ion implantation technologies) and (ii) the needs of pre-competitive research in various key areas of high technology (by making it possible to develop advanced devices and to test new concepts in photonics, RF communications, nanoelectronics and biomedicine). The access to the LMN is also vital for researchers involved in the general areas of materials synthesis and/or characterization for applications in other sectors, namely tribological coatings, energy, environment, etc. The access to this resource is essential for 54 principal researchers from (12) Canadian universities, for 41 collaborators and more than 50 secondary users across Canada and abroad. It is also at the heart of the training of more than 210 postgraduate students (M.Sc. and Ph.D.) and 48 postdoctoral fellows. In our development strategy, the support of NSERC to LMN is absolutely crucial to continue to capitalize on the exceptional momentum of the last few years that made the LMN one of the leading international laboratories of the academic sector in a multidisciplinary domain (physics, chemistry, materials science, electrical and computer engineering, etc.).