Grant: Research Tools and Instruments - Category 1 (<$150,000)
Concordia University
$78,790.00
Double side mask aligner for micromachining using photolithography
EF 1992-93
Résumé
No summary - Aucun sommaire
Programme
Research Tools and Instruments - Category 1 (<$150,000)
Bénéficiaire
Emplacement
Quebec, Canada
Type de bénéficiaire
Academia
Type
Grant
Source
NSERC's Awards Data
Tel que publié
Application id
139537-1993
Name nom
Bhat, Rama
Department département
Mechanical Engineering
Organization id
70
Institution établissement
Concordia University
Province en
Québec
Province fr
Québec
Country en
CANADA
Country fr
CANADA
Fiscal year exercice financier
1992
Competition year année de concours
1993
Award amount
78790
Program id
EQPEQ
Program nane en
Research Tools and Instruments - Category 1 (<$150,000)
Program name fr
Outils et instruments de recherche - catégorie 1 (<150 000$)
Group en
Discovery grants programs
Group fr
Programmes de subventions à la découverte
Committee code
13
Committee name en
Mechanical Engineering
Committee name fr
Génie mécanique
Area of application code
512
Area of application group en
Manufacturing processes and products
Area of application group fr
Procédés et produits industriels
Area of application en
Transport equipment
Area of application fr
Matériel de transport
Research subject code
2100
Research subject group en
Mechanical engineering
Research subject group fr
Génie mécanique
Research subject en
Mechanical engineering
Research subject fr
Génie mécanique
Partie
1
Nb partie
1
Application title
Double side mask aligner for micromachining using photolithography
Keyword
NA
Application summary
No summary - Aucun sommaire
