Grant: Strategic Projects - Group

High pressure abrasive waterjet (AWJM) and low pressure abrasive slurry jet micromachining (ASJM) use asmall high-speed water jet to accelerate microscopic abrasive particles toward a target material. Using thesenovel technologies, various microscale features (e.g. microchannels, through cuts and holes, etc) can bemechanically etched into virtually any material without having to use a stencil mask to define the features. Theetching can be controlled by varying parameters such as the particle material properties, the jet impact angle,the target feed rate, and the velocity and distribution of the particles within the jet. AWJM and ASJM are arelatively new approach to the fabrication of ceramic, polymeric, metallic, and composite materials for microelectro mechanical systems (MEMS), optoelectronic, micro-fuel cell, microfluidic applications, and automotiveapplications. Advantages of these technologies over traditional microfabrication processes include a muchhigher material removal rate, a much lower equipment cost, environmental friendliness (no chemicals) and theability to etch materials to different depths on a single substrate without creating a heat damaged zone. As aresult, simple low cost and environmentally friendly systems can be installed to provide a method for in houserapid prototyping of novel micro scale components or for rapidly cutting materials. The proposed research aimsto establish and experimentally verify process models that will extend the application of abrasive waterjettechnologies from traditional large scale cutting to the much more precise realm of micromachining of featuresin the materials (polymers, ceramics, composites and layered materials) that will form the next generation ofcomponents of interest to our industrial partners. These process models will incorporate the effect of changes ina wide variety of process parameters (particle size, shape, velocity, target material, etc.) on the predicted etchedshape. This fundamental research will form the basis for improving AWJM and ASJM potential as low costand rapid-turnaround technology platforms for the microfabrication of novel components for a wide variety ofindustries in Canada.