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Grant: Alliance Grants

Université de Sherbrooke

$319,430.00

A versatile multi-project cleanroom fabrication process for superconducting quantum circuits

EF 2024-25

Résumé
Quantum information technology is currently transiting from academia to industry and the complexity of nanofabrication processes for state-of-the-art devices is growing rapidly. It is now exceeding the research and development capacity of start-up companies or academic research groups. In order to ensure continuous progress of quantum information technology, it is, therefore, necessary to pool the manufacturing efforts of small companies and research groups so as not to restrict the use of this strategic technology to a few large multinational companies. The goal of this project is to set up a pilot line for shared nanofabrication of state-of-the-art superconducting circuits in Canada. The project is based on a close collaboration between experts in superconducting quantum circuits at Institut Quantique (IQ) of Université de Sherbrooke (UdeS) and experts in micro- and nanofabrication at 3IT of UdeS where the transition to shared manufacturing has already taken place. The industrial partner CMC Microsystems, an expert in the mutualization of processes and tools for the Canadian academic and industrial world, will ensure that the project corresponds to the needs of the market. Equipment manufacturers Angstrom Engineering and Raith will contribute their expertise in thin film deposition and e-beam lithography to the project which will in turn help them to optimize their tools for quantum systems. The results of this project will be used directly by the industrial partner Nord Quantique, a start-up company in Sherbrooke that manufactures superconducting quantum circuits.
Programme
Alliance Grants
Emplacement
Quebec, Canada
Type de bénéficiaire
Academia
Type
Grant
Source
NSERC's Awards Data

Tel que publié

Application id
576748-2022
Name nom
Hofheinz, Max M
Department département
Génie électrique et génie informatique
Organization id
68
Institution établissement
Université de Sherbrooke
Province en
Québec
Province fr
Québec
Country en
CANADA
Country fr
CANADA
Fiscal year exercice financier
2024
Competition year année de concours
2022
Award amount
319430
Program id
ALLRP
Program name en
Alliance Grants
Program name fr
Subventions Alliance
Group en
RESEARCH PARTNERSHIPS
Group fr
PARTENARIATS DE RECHERCHE
Committee code
96
Committee name en
RPP Internal Decision Cttee
Committee name fr
Cté de décision interne - PPR
Area of application code
802
Area of application group en
Information and communication services
Area of application group fr
Services d'information et de télécommunications
Area of application en
Information systems and technology
Area of application fr
Systèmes d'information et technologie de l'information
Research subject code
2519
Research subject group en
Electrical and electronic engineering
Research subject group fr
Génie électrique et électronique
Research subject en
Microelectronics
Research subject fr
Microélectronique
Field of research list names en
Not available
Field of research list names fr
Non disponible
Socioeconomic objective list names en
Not available
Socioeconomic objective list names fr
Non disponible
Application title
A versatile multi-project cleanroom fabrication process for superconducting quantum circuits
Keywords
electrons beam lithography; metrology; nanofabrication; quantum information; superconducting quantum circuits; thin film deposition
Application summary
Quantum information technology is currently transiting from academia to industry and the complexity of nanofabrication processes for state-of-the-art devices is growing rapidly. It is now exceeding the research and development capacity of start-up companies or academic research groups. In order to ensure continuous progress of quantum information technology, it is, therefore, necessary to pool the manufacturing efforts of small companies and research groups so as not to restrict the use of this strategic technology to a few large multinational companies. The goal of this project is to set up a pilot line for shared nanofabrication of state-of-the-art superconducting circuits in Canada. The project is based on a close collaboration between experts in superconducting quantum circuits at Institut Quantique (IQ) of Université de Sherbrooke (UdeS) and experts in micro- and nanofabrication at 3IT of UdeS where the transition to shared manufacturing has already taken place. The industrial partner CMC Microsystems, an expert in the mutualization of processes and tools for the Canadian academic and industrial world, will ensure that the project corresponds to the needs of the market. Equipment manufacturers Angstrom Engineering and Raith will contribute their expertise in thin film deposition and e-beam lithography to the project which will in turn help them to optimize their tools for quantum systems. The results of this project will be used directly by the industrial partner Nord Quantique, a start-up company in Sherbrooke that manufactures superconducting quantum circuits.