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Grant: Research Tools and Instruments - Category 1 (<$150,000)

Queen's University

$133,625.00

Focused ion beam tool for nanometer-scale fabrication and characterization

EF 2007-08

Résumé
Researchers at Queen's University propose to purchase a focused ion beam tool (FIB) to be installed and operated in Kingston, Ontario.  This tool accelerates and focuses a beam of gallium ions in high vacuum onto a spot a few nanometers in diameter, with two general effects:  the ions sputter away material from the sample, etching controlled patterns in three dimensions into many different materials; and  the ion interaction with the sample causes emission of secondary electrons and x-rays, enabling characterization of the material.  By adding specific gases to the chamber, material can be deposited with the beam, or etching accelerated. The FIB is the only tool that can fabricate three-dimensional structures at the few nanometer scale in a variety of materials, and holds great potential in a number of different disciplines. Currently most FIB applications involve integrated circuit "surgery" and sample preparation for transmission electron microscopy. In conjunction with technical and training support from Fibics Inc., a Canadian company specializing in FIB services for industry, the team submitting this proposal will push into truly innovative work: using the FIB to explore the mechanical properties of tiny crystalline structures; test the limits of measurement with newly fabricated nanoscale devices; integrate micro and nanoscale devices; and evaluate the 3D structure of nano-fibers to better understand solid/liquid interfaces. Exploring such diverse questions under the supervision of the proposed team will enable numerous graduate students full training in cutting edge technology, preparing them for advanced research and employment in the government and private sectors.
Programme
Research Tools and Instruments - Category 1 (<$150,000)
Bénéficiaire
Emplacement
Ontario, Canada
Type de bénéficiaire
Academia
Type
Grant
Source
NSERC's Awards Data

Tel que publié

Application id
359614-2008
Name nom
Diak, Bradley
Department département
Mechanical and Materials Engineering
Organization id
29
Institution établissement
Queen's University
Province en
Ontario
Province fr
Ontario
Country en
CANADA
Country fr
CANADA
Fiscal year exercice financier
2007
Competition year année de concours
2008
Award amount
133625
Program id
EQPEQ
Program name en
Research Tools and Instruments - Category 1 (<$150,000)
Program name fr
Outils et instruments de recherche - catégorie 1 (<150 000$)
Group en
Discovery grants programs
Group fr
Programmes de subventions à la découverte
Committee code
4
Committee name en
Chem. & Metallurgical Eng.
Committee name fr
Génies chimique et métal.
Area of application code
1208
Area of application group en
Advancement of knowledge
Area of application group fr
Avancement des connaissances
Area of application en
Materials sciences
Area of application fr
Sciences des matériaux
Research subject code
2000
Research subject group en
Materials science and technology
Research subject group fr
Science et technologie des matériaux
Research subject en
Materials science and technology
Research subject fr
Science et technologie des matériaux
Partie
1
Nb partie
1
Application title
Focused ion beam tool for nanometer-scale fabrication and characterization
Keyword
NA
Application summary
Researchers at Queen's University propose to purchase a focused ion beam tool (FIB) to be installed and operated in Kingston, Ontario.  This tool accelerates and focuses a beam of gallium ions in high vacuum onto a spot a few nanometers in diameter, with two general effects:  the ions sputter away material from the sample, etching controlled patterns in three dimensions into many different materials; and  the ion interaction with the sample causes emission of secondary electrons and x-rays, enabling characterization of the material.  By adding specific gases to the chamber, material can be deposited with the beam, or etching accelerated. The FIB is the only tool that can fabricate three-dimensional structures at the few nanometer scale in a variety of materials, and holds great potential in a number of different disciplines. Currently most FIB applications involve integrated circuit "surgery" and sample preparation for transmission electron microscopy. In conjunction with technical and training support from Fibics Inc., a Canadian company specializing in FIB services for industry, the team submitting this proposal will push into truly innovative work: using the FIB to explore the mechanical properties of tiny crystalline structures; test the limits of measurement with newly fabricated nanoscale devices; integrate micro and nanoscale devices; and evaluate the 3D structure of nano-fibers to better understand solid/liquid interfaces. Exploring such diverse questions under the supervision of the proposed team will enable numerous graduate students full training in cutting edge technology, preparing them for advanced research and employment in the government and private sectors.