Grant: Research Tools and Instruments - Category 1 (<$150,000)
University of British Columbia
$126,929.00
Optical profiler for fabrication process development and microdevice characterization
EF 2006-07
Résumé
This grant will support research on microelectromechanical systems (MEMS), microfabrication technologies and precision manufacturing with applications in fields such as micro optics, development of non-traditional micromachining processes, tissue engineering, microvalves and inertial sensors. The requested optical profiler will enable us to measure the topology of microstructures and machined surfaces at a high lateral (< 1 µm) and vertical (< 1 nm) resolution. Optical interferometry is a contact-free characterization technique, thus avoiding contamination and mechanical damage of the surface under measurement. This optical profiler is a standard metrology tool found is state-of-the-art research facilities for microelectromechanical systems and nanotechnology. The optical profiler will support various research programs of 8 recently hired researchers at UBC with expertise in MEMS, microfabrication technologies, microelectronics, nanotechnology and precision manufacturing. The non-contact measurement capabilities of the optical profiler and its high spatial resolution are necessary for the development of new fabrication technologies for devices with small feature sizes and for the characterization of delicate microfabricated devices. It will be used to characterize microfabricated micro optics components for new video projection technologies. It will also be necessary for the development of non-traditional microfabrication technologies based on micro-electro-discharge-machining and inkjet printing for tissue engineering or microelectronics, as well as precision manufacturing technologies. The technologies that we will develop using this tool will provide Canadian researchers with new fabrication capabilities required to develop the most innovative devices. Furthermore, the optical profiler will support research on microactuators, microsensors and implantable microdevices, all of which have biomedical applications and will therefore strengthen Canada's position in this area.
Programme
Research Tools and Instruments - Category 1 (<$150,000)
Bénéficiaire
Emplacement
British Columbia, Canada
Type de bénéficiaire
Academia
Type
Grant
Source
NSERC's Awards Data
Tel que publié
Application id
345729-2007
Name nom
Stoeber, Boris
Department département
Mechanical Engineering
Organization id
2
Institution établissement
University of British Columbia
Province en
British Columbia
Province fr
Colombie-Britannique
Country en
CANADA
Country fr
CANADA
Fiscal year exercice financier
2006
Competition year année de concours
2007
Award amount
126929
Program id
EQPEQ
Program name en
Research Tools and Instruments - Category 1 (<$150,000)
Program name fr
Outils et instruments de recherche - catégorie 1 (<150 000$)
Group en
Discovery grants programs
Group fr
Programmes de subventions à la découverte
Committee code
1053
Committee name en
Mechanical Engineering - A
Committee name fr
Génie mécanique - A
Area of application code
515
Area of application group en
Manufacturing processes and products
Area of application group fr
Procédés et produits industriels
Area of application en
Instrumentation technology
Area of application fr
Technologie de l'instrumentation
Research subject code
2109
Research subject group en
Mechanical engineering
Research subject group fr
Génie mécanique
Research subject en
Mechanical systems and instrumentation
Research subject fr
Instrumentation et systèmes mécaniques
Partie
1
Nb partie
1
Application title
Optical profiler for fabrication process development and microdevice characterization
Keyword
NA
Application summary
This grant will support research on microelectromechanical systems (MEMS), microfabrication technologies and precision manufacturing with applications in fields such as micro optics, development of non-traditional micromachining processes, tissue engineering, microvalves and inertial sensors. The requested optical profiler will enable us to measure the topology of microstructures and machined surfaces at a high lateral (< 1 µm) and vertical (< 1 nm) resolution. Optical interferometry is a contact-free characterization technique, thus avoiding contamination and mechanical damage of the surface under measurement. This optical profiler is a standard metrology tool found is state-of-the-art research facilities for microelectromechanical systems and nanotechnology. The optical profiler will support various research programs of 8 recently hired researchers at UBC with expertise in MEMS, microfabrication technologies, microelectronics, nanotechnology and precision manufacturing. The non-contact measurement capabilities of the optical profiler and its high spatial resolution are necessary for the development of new fabrication technologies for devices with small feature sizes and for the characterization of delicate microfabricated devices. It will be used to characterize microfabricated micro optics components for new video projection technologies. It will also be necessary for the development of non-traditional microfabrication technologies based on micro-electro-discharge-machining and inkjet printing for tissue engineering or microelectronics, as well as precision manufacturing technologies. The technologies that we will develop using this tool will provide Canadian researchers with new fabrication capabilities required to develop the most innovative devices. Furthermore, the optical profiler will support research on microactuators, microsensors and implantable microdevices, all of which have biomedical applications and will therefore strengthen Canada's position in this area.
