Grant: Research Tools and Instruments - Category 1 (<$150,000)

The proposed research program will explore a variety of electrothermally controlled micro-electro-mechanical systems (MEMS) and micromachining methods as well as thermal methodologies for testing of very large scale integrated circuits and System-on-a-Chip (SoC). The applications of the MEMS and micromachining include implantable devices and microfluidic BioMEMS that are to offer novel diagnostic and therapeutic means for chronic and life-threatening diseases such as cancers and cardiovascular disease, contributing to saving lives and improving quality of life for Canadians and people around the world. One of the major focuses of the research will be placed on implantable devices for advanced drug delivery and thermal stress treatment (hyperthermia), both of which use precisely controlled heat generated by electromagnetic power through radiofrequency (RF) telemetry to implement the tasks. In the drug delivery device, the heat activates a thermoresponsive element to switch and regulate the release of drug. The tunability in the RF method offers an opportunity to deliver multiple drugs and highly safe operation of the targeted devices. The research and development of such electrothermally controlled devices as well as temperature-based test methodologies for SoC requires the availability of micro-scale thermal imaging to characterize 2-/3-dimensional temperature distribution resulted by the generated heat within the device and thermal diffusion to the surroundings. Such capability is also essential for characterizing the temperature buildup and distribution in the microelectrodes, a problem encountered in the development of a microfabrication technique called micro-electro-discharge machining and its batch-mode processing method for the production of MEMS and other micromachined devices. The requested micro thermal imaging system will provide a capability of thermographic analysis that enables us to tackle the thermal issues involved in the different research targets mentioned above. The equipment will benefit not only the applicant/co-applicants but also many other potential users in the broad field of Microsystems at UBC.