Grant: Idea to Innovation
British Columbia Institute of Technology
$15,000.00
Market Assessment for cold atom based sensor for atomic or molecular flux
EF 2010-11
Résumé
Market Assessment for Cold Atom Based Sensor for Atomic or Molecular Flux
The goal of this proposal is to conduct a market assessment of a cold atom based sensor for atom or molecular
flux in ultra-high vacuum (UHV) environments, such as are encountered in semiconductor processing
applications. This device is based on the measurement of loss of cold atoms from a trap due to collisions with a
flux of particles passing through the trapping volume. The advantages of this sensor are that the particle density
is connected to the loss rate from the trap through the immutable properties of atomic interactions and the loss
frequency is a readily measurable quantity. Together these provide a robust method for density determination
which is not subject to the calibration drift found in commonly used ionization gauges.
The marketing assessment will be carried out by an independent, certified management consultant, and will
focus on identifying the most promising niches for this sensor. Attention will be paid to the semiconductor
processing industry, with emphasis on molecular beam epitaxy (MBE) processing where the sensor may be
useful as an atomic beam flux measurement sensor and/or a beam profiler. Another application that will be
investigated will be the use of this device as a pressure sensor and as a pressure standard for the UHV regime.
The market assessment will identify which sectors are the most promising for commercialization, the size and
opportunity in the market, and will provide a roadmap for commercialization. The product requirements, key
specifications, standards, and interface requirements will be identified. The customer evaluation, decision, and
purchasing criteria along with the purchasing practices and timelines will be reported. The outcomes of this
assessment will help to guide the research and development of the sensor to best meet the market requirements.
Programme
Idea to Innovation
Bénéficiaire
Emplacement
British Columbia, Canada
Type de bénéficiaire
Academia
Type
Grant
Source
NSERC's Awards Data
Tel que publié
Application id
411562-2010
Name nom
Booth, James
Department département
Physics
Organization id
5974
Institution établissement
British Columbia Institute of Technology
Province en
British Columbia
Province fr
Colombie-Britannique
Country en
CANADA
Country fr
CANADA
Fiscal year exercice financier
2010
Competition year année de concours
2010
Award amount
15000
Program id
I2IPJ
Program name en
Idea to Innovation
Program name fr
De l'idée à l'innovation
Group en
Research partnerships programs
Group fr
Programmes de partenariat
Committee code
96
Committee name en
RPP Internal Decision Cttee
Committee name fr
Cté de décision interne - PPR
Area of application code
500
Area of application group en
Manufacturing processes and products
Area of application group fr
Procédés et produits industriels
Area of application en
Manufacturing processes and products
Area of application fr
Procédés et produits industriels
Research subject code
3101
Research subject group en
Physics
Research subject group fr
Physique
Research subject en
Atomic and molecular studies
Research subject fr
Études atomiques et moléculaires
Partie
1
Nb partie
1
Application title
Market Assessment for cold atom based sensor for atomic or molecular flux
Keyword
NSERC
Application summary
Market Assessment for Cold Atom Based Sensor for Atomic or Molecular Flux
The goal of this proposal is to conduct a market assessment of a cold atom based sensor for atom or molecular
flux in ultra-high vacuum (UHV) environments, such as are encountered in semiconductor processing
applications. This device is based on the measurement of loss of cold atoms from a trap due to collisions with a
flux of particles passing through the trapping volume. The advantages of this sensor are that the particle density
is connected to the loss rate from the trap through the immutable properties of atomic interactions and the loss
frequency is a readily measurable quantity. Together these provide a robust method for density determination
which is not subject to the calibration drift found in commonly used ionization gauges.
The marketing assessment will be carried out by an independent, certified management consultant, and will
focus on identifying the most promising niches for this sensor. Attention will be paid to the semiconductor
processing industry, with emphasis on molecular beam epitaxy (MBE) processing where the sensor may be
useful as an atomic beam flux measurement sensor and/or a beam profiler. Another application that will be
investigated will be the use of this device as a pressure sensor and as a pressure standard for the UHV regime.
The market assessment will identify which sectors are the most promising for commercialization, the size and
opportunity in the market, and will provide a roadmap for commercialization. The product requirements, key
specifications, standards, and interface requirements will be identified. The customer evaluation, decision, and
purchasing criteria along with the purchasing practices and timelines will be reported. The outcomes of this
assessment will help to guide the research and development of the sensor to best meet the market requirements.