Grant: Research Tools and Instruments - Category 1 (<$150,000)
University of Manitoba
$81,900.00
Rapid thermal annealing (RTA) system for advanced CMOS, MEMs, and polymer-based materials and devices
EF 2008-09
Résumé
Dimensional scaling of many different types of materials and devices has been required to continue to meet the demands of the ever-increasing performance requirements. To produce advanced materials and devices, precise control on the scale of individual atoms is required. This type of control is required for many research areas, including, advanced silicon-based materials and devices, polymer-based devices for memory and sensor applications, micro-electro-mechanical systems (MEMS), photonic bandgap materials and devices, etc.. It is the acquisition of a Rapid Thermal Annealing (RTA) system that is the focus of this proposal. The RTA system is required for material and device fabrication to maintain precise control of temperature, ambient and timescales (seconds) where tradition thermal furnaces cannot be used.
Programme
Research Tools and Instruments - Category 1 (<$150,000)
Bénéficiaire
Emplacement
Manitoba, Canada
Type de bénéficiaire
Academia
Type
Grant
Source
NSERC's Awards Data
Tel que publié
Application id
374559-2009
Name nom
Buchanan, Douglas
Department département
Electrical and Computer Engineering
Organization id
19
Institution établissement
University of Manitoba
Province en
Manitoba
Province fr
Manitoba
Country en
CANADA
Country fr
CANADA
Fiscal year exercice financier
2008
Competition year année de concours
2009
Award amount
81900
Program id
EQPEQ
Program nane en
Research Tools and Instruments - Category 1 (<$150,000)
Program name fr
Outils et instruments de recherche - catégorie 1 (<150 000$)
Group en
Discovery grants programs
Group fr
Programmes de subventions à la découverte
Committee code
1079
Committee name en
Electrical and Computer Engineering
Committee name fr
Génie électrique et de l'informatique
Area of application code
513
Area of application group en
Manufacturing processes and products
Area of application group fr
Procédés et produits industriels
Area of application en
Electrical and electronic machinery and equipment (including computer hardware)
Area of application fr
Machinerie et équipement électriques et électroniques (y compris matériel informatique)
Research subject code
2519
Research subject group en
Electrical and electronic engineering
Research subject group fr
Génie électrique et électronique
Research subject en
Microelectronics
Research subject fr
Microélectronique
Partie
1
Nb partie
1
Application title
Rapid thermal annealing (RTA) system for advanced CMOS, MEMs, and polymer-based materials and devices
Keyword
NA
Application summary
Dimensional scaling of many different types of materials and devices has been required to continue to meet the demands of the ever-increasing performance requirements. To produce advanced materials and devices, precise control on the scale of individual atoms is required. This type of control is required for many research areas, including, advanced silicon-based materials and devices, polymer-based devices for memory and sensor applications, micro-electro-mechanical systems (MEMS), photonic bandgap materials and devices, etc.. It is the acquisition of a Rapid Thermal Annealing (RTA) system that is the focus of this proposal. The RTA system is required for material and device fabrication to maintain precise control of temperature, ambient and timescales (seconds) where tradition thermal furnaces cannot be used.
