Grant: Alliance Grants

The proposed collaboration is between the Precision Mechatronics Laboratory at Memorial University of Newfoundland (MUN) and the mechatronics and control research group at the Department of Mechanical Engineering at Technical University of Eindhoven (TUE), Netherlands. This international collaboration with TUE in wafer scanner technology will be important to developing such advanced technology in Canada. Canada does not currently have access to such advanced technology and expertise. The main objective of this work is to develop piezoceramic actuators to advance the precision of the wafer scanner systems by adding a fine stroke system that can correct the motion stages positioning errors of the wafer scanners. This collaboration provides Canada the opportunity to have a foothold on the next-generation wafer scanner technology systems. Specifically, integrating the piezoceramic actuators industry within the advanced motion systems of the wafer scanner systems. The international collaborator will provide the data positioning errors of the wafer scanner system and test the new controlled piezoceramic actuators in wafer scanners. The applicant team will design a control system based on the wafer scanner motion errors, and apply the proposed control system with the piezoceramic actuators on an industrial motion stage to design a new motion trajectory bridging piezoceramic industry in Canada into motion scanning technology in wafer scanners. The collaboration will allow the HQPs at MUN to develop their professional skills by networking with the researchers and engineers at TUE. The HQPs will have the opportunity to visit the TUE to network, collaborate, and present the current research results of the MUN group on precision mechatronics and control.